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실리카 슬러리의 에이징 효과 및 산화막 CMP 특성

이우선, 고필주, 이영식, 서용진, 홍광준

Aging Effects of Silica Slurry and Oxide CMP Characteristics

U Seon Lee, Pil Ju Go, Yeong Sig Lee, Yong Jin Seo, Gwang Jun Hong
J Korean Inst Electr Electron Mater Eng 2004;17(2):138-143.
Published online: February 1, 2004
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Aging Effects of Silica Slurry and Oxide CMP Characteristics
J Korean Inst Electr Electron Mater Eng. 2004;17(2):138-143.   Published online February 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.2.138
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Include:
Aging Effects of Silica Slurry and Oxide CMP Characteristics
J Korean Inst Electr Electron Mater Eng. 2004;17(2):138-143.   Published online February 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.2.138
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