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AIN thin film
WHERE t1.sid in(parameter_dbtbl_keyword '%AIN thin film%') and t1.xml_status <> 99
2
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"AIN thin film"
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AIN thin film (2)
Composite residual stress (1)
Flat band voltage (1)
GaAs (1)
Piezoelectric microspeaker (1)
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Publication year
2008 (2)
Authors
Hee Chan Cho (1)
Kyong Shik Jeong (1)
Seung Hwan Yi (1)
Keywords
AIN thin film (2)
Composite residual stress (1)
Flat band voltage (1)
GaAs (1)
Piezoelectric microspeaker (1)
Reactive sputtering method (1)
Si (1)
Soung pressure Level (1)
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authors
Hee Chan Cho (1)
Kyong Shik Jeong (1)
Seung Hwan Yi (1)
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2008 (2)
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"AIN thin film"
Characteristics of Piezoelectric Microspeakers according to the Material Properties
Kyong Shik Jeong, Hee Chan Cho, Seung Hwan Yi
J Electr Electron Mater
2008;21(6):556-561.
Published online June 1, 2008
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Properties Electric of AIN Thin Film on the Si and GaAs Substrate
J Electr Electron Mater
2008;21(1):5-11.
Published online January 1, 2008
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