Pb(Zr0.52Ti0.48)O3 (PZT) films with a thickness of 5~10 μm at the morphotropic phase boundary were fabricated by aerosol-deposition (AD), and their phase evolution and electrical properties were investigated. The microstructure of the AD PZT films revealed nanosized grains with a low crystallinity and a dense structure at room temperature. The AD PZT films showed a mixture of tetragonal and rhombohedral phases. The post-annealing temperature was varied to study the phase transition behavior. The crystallinity of the AD PZT films was enhanced by annealing at 450, 550, and 650℃ for 2 h. At 650℃, the tetragonal and rhombohedral phases reacted to form a bridge phase between the two phases. The polarization-electric field hysteresis loops of the AD PZT film annealed at 650℃ exhibited a smaller cohesive field and a lower slim hysteresis than the films annealed at 450 and 550℃.
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Defect modulated dielectric properties in powder aerosol deposited ceramic thick films Udo Eckstein, Neamul H. Khansur, Daisuke Urushihara, Toru Asaka, Ken-ichi Kakimoto, Tobias Fey, Kyle G. Webber Ceramics International.2022; 48(22): 33082. CrossRef
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