Transparent amorphous In-Si-O (ISO)/Ag/In-Si-O (ISO) has been reported for low emissivity(low-e) applications. Effective Si doping into the In2O3 matrix led to a completely amorphous ISO film aswell as a low resistivity and a high optical transmittance. The optical and electrical performances wereexamined by measuring transmittance with a UV-VIS spectrophotometer and resistivity with a Hall effectmeasurement. Consequently, low-e glass with ISO/Ag/ISO showed a high transparency in the visibleregion and low emissivity in the infrared region, indicating that ISO is a promising amorphoustransparent electrode for low-e glass.