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Anisotropic wet etching
WHERE t1.sid in(parameter_dbtbl_keyword '%Anisotropic wet etching%') and t1.xml_status <> 99
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Anisotropic wet etching (1)
Embossing (1)
Multi-mode planar waveguide (1)
Silicon hard master (1)
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2005 (1)
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Yu Min Jung (1)
Yeong Cheol Kim (1)
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Anisotropic wet etching (1)
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Multi-mode planar waveguide (1)
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Yu Min Jung (1)
Yeong Cheol Kim (1)
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"Anisotropic wet etching"
Multi-mode Planar Waveguide Fabricated by a (110) Silicon Hard Master
Yu Min Jung, Yeong Cheol Kim
J Electr Electron Mater
2005;18(12):1106-1110.
Published online December 1, 2005
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