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BMN thin films
WHERE t1.sid in(parameter_dbtbl_keyword '%BMN thin films%') and t1.xml_status <> 99
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Embedded capacitor (1)
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2007 (1)
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"BMN thin films"
Characteristics of BMN Thin Films Deposited on Various Substrates for Embedded Capacitor Applications
J Electr Electron Mater
2007;20(4):342-347.
Published online April 1, 2007
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