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"Capacitance type"

Thin Films and Sensors : A Study on the Fabrication and Electrical Characteristics of Hydraulic Pressure Sensors by Using Ceramics Materials
Sung Hyun Park, Eun Sup Kim, Jung Kyun Jung
J Electr Electron Mater 2015;28(6):384-389.   Published online June 1, 2015
In this paper, we fabricated ceramic body and sapphire wafer in order to develop a hydraulic pressure sensor with high sensitivity and high temperature stability. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4 ㎜ and a thickness of 1 ㎜ by using alumina powders. Ceramic body was processed with a diameter 32.4 ㎜ and a thickness 5 ㎜. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure.
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