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"Ferroelectric thin films"

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"Ferroelectric thin films"

Regular Paper : Elecironic Ceramics ; Growth of ZnSnO3 Thin Films on c-Al2O3 (0001) Substrate by Pulsed Laser Deposition
Trung Tran Manh, Jae-Ryoug Lim, Soon-Gil Yoon
J Korean Inst Electr Electron Mater Eng 2014;27(5):297-302.   Published online May 1, 2014
DOI: https://doi.org/10.4313/JKEM.2014.27.5.297
l.ao.5Sro5CoO₃ (LSCO) electrode thin films with a resistivity of ~ 1,600 μΩcm were grown on c-Al₂O₃ (0001) substrates. ZnsnO₃ (ZTO) thin films with different thicknesses were directly grown on LSCO/c-Al₂O₃ (0001) substrates at a substrate temperature that ranged from 550 to 750 ℃ using Pulsed Laser Deposition (PLD). The secondary phase Zn₂SnO₄ occurred during the growth of ZTO films and it became more significant with further increasing substrate temperature. Polarization-electrc-field (P-E) hysteresis characteristics. with a remnant polarization and coercive field of 0.05 μC/㎠ and 48 kv/cm, respectively, were obtained in the ZTO film grown at 700℃ in 200 mTorr.
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