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GaN film
WHERE t1.sid in(parameter_dbtbl_keyword '%GaN film%') and t1.xml_status <> 99
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AIN buffer layer (1)
Dislocation (1)
GaN film (1)
R.F sputter (1)
X-ray scattering (1)
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2004 (1)
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Min Su Lee (1)
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AIN buffer layer (1)
Dislocation (1)
GaN film (1)
R.F sputter (1)
X-ray scattering (1)
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"GaN film"
Effect of AIN Buffers by R. F. Sputter on Defects of GaN Thin Films
Min Su Lee
J Korean Inst Electr Electron Mater Eng
2004;17(5):497-501.
Published online May 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.5.497
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