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"Gas barrier film"

Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays
Ji Hwan Kim, Do Hyun Cho, Sun Young Sohn, Hwa Min Kim, Jong Jae Kim
J Korean Inst Electr Electron Mater Eng 2009;22(5):425-430.   Published online May 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.5.425
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