Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
Search
Advanced Search
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Page Path

2
results for

"HMDS"

Keywords

Publication year

Authors

"HMDS"

Growth of Single Crystalline 3C-SiC Thin Films for High Power Devices by CVD
Gwiy Sang Chung, Jae Cheol Shim
J Korean Inst Electr Electron Mater Eng 2010;23(2):98-102.   Published online February 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.2.098
  • 67 View
  • 0 Download
Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Korean Inst Electr Electron Mater Eng 2007;20(2):156-161.   Published online February 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.2.156
  • 72 View
  • 0 Download
First First Prev Prev
Page of 1
Next Next Last Last