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LPCVD
WHERE t1.sid in(parameter_dbtbl_keyword '%LPCVD%') and t1.xml_status <> 99
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"LPCVD"
Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD
J Electr Electron Mater
2006;19(8):732-736.
Published online August 1, 2006
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