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LPCVD
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"LPCVD"
Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD
J Korean Inst Electr Electron Mater Eng
2006;19(8):732-736.
Published online August 1, 2006
DOI:
https://doi.org/10.4313/JKEM.2006.19.8.732
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