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Low temperature process
WHERE t1.sid in(parameter_dbtbl_keyword '%Low temperature process%') and t1.xml_status <> 99
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"Low temperature process"
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Low temperature process (2)
Contact angle (1)
E×B drift (1)
Facing target sputtering (1)
Gas barrier film (1)
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2009 (1)
2008 (1)
Authors
Wook Cho (1)
Do Hyun Cho (1)
Ji Hwan Kim (1)
Hwa Min Kim (1)
Jong Jae Kim (1)
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Keywords
Low temperature process (2)
Contact angle (1)
E×B drift (1)
Facing target sputtering (1)
Gas barrier film (1)
PET film (1)
SPM (1)
Uniformity (1)
ZrO2 (1)
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authors
Wook Cho (1)
Do Hyun Cho (1)
Ji Hwan Kim (1)
Hwa Min Kim (1)
Jong Jae Kim (1)
Sun Young Sohn (1)
Sung Chae Yang (1)
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"Low temperature process"
Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays
Ji Hwan Kim, Do Hyun Cho, Sun Young Sohn, Hwa Min Kim, Jong Jae Kim
J Electr Electron Mater
2009;22(5):425-430.
Published online May 1, 2009
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Plasma surface Treatment of the Polymeric Film with Low Temperature Process
Wook Cho, Sung Chae Yang
J Electr Electron Mater
2008;21(5):486-491.
Published online May 1, 2008
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