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M/NEMS
WHERE t1.sid in(parameter_dbtbl_keyword '%M/NEMS%') and t1.xml_status <> 99
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APCVD (1)
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"M/NEMS"
Raman Scattering Characteristics on 3C-SiC Thin Films Deposited by APCVD Method
J Korean Inst Electr Electron Mater Eng
2007;20(7):606-610.
Published online July 1, 2007
DOI:
https://doi.org/10.4313/JKEM.2007.20.7.606
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