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MIM capacitor
WHERE t1.sid in(parameter_dbtbl_keyword '%MIM capacitor%') and t1.xml_status <> 99
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MIM capacitor (1)
MMIC (1)
PECVD (1)
Silicon nitride (1)
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2004 (1)
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Chun Bae Park (1)
Ho Geun Seong (1)
Sun Jin So (1)
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MIM capacitor (1)
MMIC (1)
PECVD (1)
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"MIM capacitor"
Deposition and Electrical Properties of Silicon Nitride Thin Film MIM Capacitors for MMIC Applications
Ho Geun Seong, Sun Jin So, Chun Bae Park
J Electr Electron Mater
2004;17(3):283-288.
Published online March 1, 2004
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