MOS-FET structured gas sensors were manufactured using MWCNTs for application as NOx gas sensors. As the gas sensors need to be heated to facilitate desorption of the gas molecules, heat dispersion plays a key role in boosting the degree of uniformity of molecular desorption. We report the desorption of gas molecules from the sensor at 150℃ for different sensor electrode gaps (30, 60, and 90 μm). The COMSOL analysis program was used to verify the process of heat dispersion. For heat analysis, structure of FET gas sensor modeling was proceeded. In addition, a property value of the material was used for two-dimensional modeling. To ascertain the degree of heat dispersion by FEM, the governing equations were presented as partial differential equations. The heat analysis revealed that although a large electrode gap is advantageous for effective gas adsorption, consideration of the heat dispersion gradient indicated that the optimal electrode gap for the sensor is 60 μm.

Carbon nanotubes(CNT) has chemical stability and great sensitivity characteristics. In particular, the gassensor required characteristics such as rapid, selectivity and sensitivity sensor. Therefore, CNT are ideal materialsto gas sensor. So, we fabricated the NOx gas sensors of MOS-FET type using the MWCNT (multi-walled carbonnanotube). The fabricated sensor was used to detect the NOx gas for the variation of Vgs (gate-source voltage)and electrode changed electrode spacing=30, 60, 90[㎛]. The gas sensor absorbed with the NOx gas moleculesshowed the decrease of resistance, and the sensitivity of sensor was increased by magnification of electrodespacing. Furthermore, when the voltage(Vgs) was applied to the gas sensor, the decrease in resistance wasincreased. On the other hand, the sensor sensitivity for the injection of NOx gas was the highest value at theelectrode spacing 90[㎛]. We also obtained the adsorption energy(Vgs) using the Arrhenius plots by the reduction ofresistance due to the voltage variations. As a result, we obtained that the adsorption energy was increased withthe increment of the applied voltages.

Carbon nanotubes (CNT) has the excellent physical characteristics in the sensor, medicine, manufacturing and energy fields, and it has been studied in those fields for the several years. We fabricated the NOx gas sensors of MOS-FET type using the MWCNT. The fabricated sensor was used to detect the NOx gas for the variation of Vgs (gate-source voltage) with the ambient temperature. The gas sensor absorbed the NOx gas molecules showed the decrease of resistance, and the sensitivity of sensor was reduced by the NOx gas molecules accumulated on the MWCNT surface. Furthermore, when the voltage (Vgs) was applied to the gas sensor, the term of the decrease in resistance was increased. On the other hand, the sensor sensitivity for the injection of NOx gas was the highest value at the ambient temperature of 40℃. We also obtained the adsorption energy (Vgs)using the Arrhenius plots by the reduction of resistance due to the Vgs voltage variations. As a result, we obtained that the adsorption energy also was increased with the increasement of the applied Vgs voltages.

Carbon nanotubes(CNT) has strength and chemical stability, greatly conductivity characteristics. In particular, MWCNT (multi-walled carbon nanotubes) show rapidly resistance sensitive for changes in the ambient gas, and therefore they are ideal materials to gas sensor. So, we fabricated NOx gas sensors structured MOS-FET using MWCNT (multi-walled carbon nanotubes) material. We investigate the change resistance of NOx gas sensors based on MOS-FET with ultra lean NOx gas concentrations absorption. And NOx gas sensors show sensitivity on the change of gate-source voltage (V98 =0[V] or V98=3.5[V]). The gas sensors show the increase of sensitivity with increasing the temperature (largest value at 40℃). On the other hand, the sensitivity of sensors decreased with increasing of NOx gas concentration. In addition, We obtained the adsorption energy(Ua), Ua = 0.06714[eV] at the NOx gas concentration of 8[ppm], Ua = 0.06769[eV] at 16[ppm], Ua = 0.06847[eV] at 24[ppm] and Ua = 0.06842[eV] at 32[ppm], of NOx gas molecules concentration on the MWCNT gas sensors surface with using the Arrhenius plots. As a result, the saturation phenomena is occurred by NOx gas injection of concentration for 32[ppm].