As the operating environment in semiconductor processes becomes demanding, research is being conducted to manufacture dense alumina substrates without defects after sintering to ensure high durability of electrostatic chucks, which are critical components in semiconductor equipment. Therefore, in this study, in order to manufacture green sheets with a high filling ratio for implementing a high-density substrate, alumina powders with average particle sizes of 2.07 μm (L) and 0.37 μm (S) were mixed in ratios of 9:1, 8:2, 7:3, and 6:4, respectively, and green sheets were manufactured and the filling ratio and sintering behavior were observed. Green sheets were fabricated by preparing a slurry using organic materials in Al₂O₃ powders of different particle sizes. The packing density of the green sheet mixed with L and S alumina powders with different average particle sizes in a ratio of 7:3 before and after binder burn-out showed the highest values of 3.19 g/cm³ and 2.87 g/cm³, respectively. As a result of observing the sintered density based on the mixing ratio of alumina powders revealed that the alumina sheet mixed at a 6:4 ratio of L and S powders, sintered at 1,700℃, exhibited the best sintering characteristics with a density of 3.96 g/cm³.

For machine learning techniques, a large amount of high-quality material property data should be accumulated. In this study, several data for an alumina tape casting process were produced with the variables of slurry viscosity, gap size, and coating speed. The alumina tapes were manufactured in the range of 1,000~6,000 cps for slurry viscosity, 300~1,000 ㎛ for gap size, and 0.5~2.0 m/min for coating speed. As a result, the lower the viscosity, coating speed, and gap size, the more pore-free tapes could be manufactured. The viscosity of the slurry limited the minimum thickness of the tape. Green sheets with high packing density were manufactured from the slurry of 100~6,000 cps slurry viscosity, coating speed of 0.5 m/min, and a 300~500 ㎛ gap size.

There is growing interest in power inductors in which metal soft magnetic powder and epoxy resin are combined. In this field, the process technology for increasing the packing density of magnetic particles in an injection molding process is very important. However, little research has been reported in this regard. In order to improve the packing density, we investigated and compared the sedimentation heights of pastes for three types of soft magnetic alloy powders as a function of the mixing ratios and the type of resin used. Experimental results showed that the packing density was the highest (71.74%) when the mixing ratio was 80：16：4 (Sendust：Fe-Si：CIP) according to the particle size using an SE-4125 resin. In addition, the packing density was found to be inversely related to the layer separation distance. As a result, it was confirmed that the dispersion of solid particles in the paste was important for curing; however, the duration of the curing process can greatly affect the packing density of the final composite.

It is necessary for ferrite sheets to be fabricated with high packing density for excellent electrical properties and high strength. In this study, the relationship between the warpage and the packing density of ferrite green sheet, was investigated with amount variation of organic additives. With 0.4 wt% of dispersant, the packing density was about 48% and warpage appeared 0.5~1.3 ㎜ high. With 1.4 wt% of dispersant, the packing density increased up to 57% and warpage appeared 0.8~2.1 ㎜ high. With high packing density, warpage appeared along the edges of specimen, while with low packing density, deformation appeared over whole specimen inhomogeneously. It is thought that inhomogeneous deformation after sintering came from the inhomogeneity in green sheet prepared with badly dispersed slurry. With good homogeneity in green sheet from well-dispersed slurry, isotropic shrinkage is thought to have occurred along the distance from center to edges of specimen during sintering.