One-dimensional (1D) photonic crystals (PCs) were prepared by TeOx(2＜x＜3)/SiO2 with thedifference refractive index, and fabricated by sputtering technique from a TeO2 and SiO2 target. TheTeOx(2＜x＜3) layers were fabricated by using the sputtering gas ratio (Ar:O2=40:10). A 10-pair TeOx(2＜x＜3)/SiO2 1D PCs were fabricated with the structure parameters of filling factor=0.5185, and period=410nm. The properties of 1D PCs with and without a defect layer were evaluated by UV-VIS-NIR. Anormal mode 1D PC have a photonic band gap (PBG) in the near infrared (NIR) region from 1,203 to1,421 nm. In the case of 1D PC containing a defect layer, a defect level appears at 1,291 nm. Themeasured transmittance (T) spectra are nearly corresponding to calculated results. After He-Cd laserexposure, the defect level is shifted from 1,291 nm to 1,304 nm.

In this paper, we have theoretically analyzed and designed a dielectric multi-layer sensor with a SPR (surface plasmon resonance) using analytical calculation and FDTD (finite difference time-domain) methods. The proposed structure is composed of periodic layer and thin metal film. It has many advantages. One of that is a high sensitivity of the SPR. Another is a high Q-factor of the characteristics in the PhC (photonic crystals) micro-cavity structure. The incident light has double resonance characteristics, because the filtered light by PhC structure, dielectric multi-layer, is met the thin metal film for SPR effect. We have also observed the change of resonance characteristics according to the variation of effective index on the metal film.