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Photoresist
WHERE t1.sid in(parameter_dbtbl_keyword '%Photoresist%') and t1.xml_status <> 99
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Photoresist (4)
Ozone (2)
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Tae Kyung Ha (1)
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Jong Chang Woo (1)
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"Photoresist"
Removal of Photoresist Mask after the Cl2/HBr/CF4 Reactive Ion Silicon Etching
Tae Kyung Ha, Jong Chang Woo, Gwan Ha Kim, Chang Il Kim
J Korean Inst Electr Electron Mater Eng
2010;23(5):353-357.
Published online May 1, 2010
DOI:
https://doi.org/10.4313/JKEM.2010.23.5.353
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A Study on the Realization of the High Efficiency LCD Photoresist Removal Technology
J Korean Inst Electr Electron Mater Eng
2007;20(11):977-982.
Published online November 1, 2007
DOI:
https://doi.org/10.4313/JKEM.2007.20.11.977
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64
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0
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Effect of Aromatic Acid Amplifier, 2-hydroxy-2`-tosyloxy Biphenyl, on the kind of Resist Resins
J Korean Inst Electr Electron Mater Eng
2005;18(6):499-505.
Published online June 1, 2005
DOI:
https://doi.org/10.4313/JKEM.2005.18.6.499
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68
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A Study on Photoresist Strip Process using DIO3
J Korean Inst Electr Electron Mater Eng
2004;17(11):1143-1148.
Published online November 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.11.1143
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67
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Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm
J Korean Inst Electr Electron Mater Eng
2004;17(8):806-811.
Published online August 1, 2004
DOI:
https://doi.org/10.4313/JKEM.2004.17.8.806
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