In this study, we created a DBD plasma device and a MnO₂ catalyst mesh filter for evaluating ozone reduction of devices via the catalyst method. The DBD plasma device was manufactured by applying MnO₂ paste to soda lime glass via the screen-printing method. The MnO₂ catalyst mesh filter was manufactured by mixing MnO₂ powder with binder with a 10% difference in concentration from 10% to 50% and then applying it using the dip-coating method. Finally, we sintered a MnO₂ catalyst mesh filter in an electric furnace. We evaluated the characteristics of ozone generation according to the MnO₂ gas flow of DBD plasma devices, the opening ratio, and ozone reduction performance of the MnO₂ catalyst filters. Ozone reduction performance was approximately 20.4% at MnO₂10 wt%, 37.8% at MnO₂ 30 wt% and 50% at MnO₂ 50 wt%.

Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.