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"Poly 3C-SiC"

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"Poly 3C-SiC"

Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications
Jeong Hwan Seo, Sang Soo Noh, Kwang Ho Kim
J Electr Electron Mater 2010;23(4):317-322.   Published online April 1, 2010
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Mechanical Properties of in-situ Doped Polycrystalline 3C-SiC Thin Films by APCVD
Kang San Kim, Gwiy Sang Chung
J Electr Electron Mater 2009;22(3):235-238.   Published online March 1, 2009
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Raman Scattering Characteristics on 3C-SiC Thin Films Deposited by APCVD Method
J Electr Electron Mater 2007;20(7):606-610.   Published online July 1, 2007
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Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Electr Electron Mater 2007;20(2):156-161.   Published online February 1, 2007
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