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"Polymer pen array soft lithography"

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"Polymer pen array soft lithography"

Regular Paper : Micro Patterning Using Active Polymer Pen Array
Yoon Soo Han, Ji Hwa Hong
J Electr Electron Mater 2013;26(12):853-857.   Published online December 1, 2013
We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest proof-of-concept array fabricated is 4×4 with a spacing of 250 μm in both x and y axes.
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