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"Quarter-segment"

Design and Optimization of Doping Concentration of the JFET Region of 4H-SiC VDMOSFETs
Hye-won Lee, Ye-jin Kim, Chang-jun Park, Ji-soo Choi, Geon-hee Lee, Sang-mo Koo
J Electr Electron Mater 2025;38(1):101-106.   Published online January 1, 2025
DOI: https://doi.org/10.4313/JKEM.2025.38.1.14
The 4H-SiC VDMOSFET demonstrates a high reverse breakdown voltage (BV) due to the JFET region but experiences relatively high on-resistance (Ron). A widely adopted method to reduce the Ron is to uniformly increase the doping concentration of the JFET region, which results in a trade-off that reduces the BV. This study proposes a method to optimize the segmentation of the JFET region by selectively increasing the doping concentration using ‘total doping’, ‘half-doping’, and ‘quarter-doping’. The optimized quarter segment with a specific doping concentration slightly reduces BV, but the sharp decrease in specific on-resistance (Ron,sp) results in a 105% improvement in the performance index, Baliga’s Figure of Merit (BFOM). This research suggests the potential for electrically superior designs by modifying the doping concentration in the JFET region of conventional VDMOSFET structures.
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