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"RF magnetorn sputtering"

Effect of Bias Voltage of Influenced on a Property of Electrical and Optical of ZnO:Al
J Korean Inst Electr Electron Mater Eng 2005;18(6):493-498.   Published online June 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.6.493
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