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"Small cell pitch"

Design and Analyzing of Electrical Characteristics of 1,200 V Class Trench Si IGBT with Small Cell Pitch
Ey Goo Kang
J Electr Electron Mater 2020;33(2):105-108.   Published online March 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.2.5
In this study, experiments and simulations were conducted for a 1,200-V-class trench Si insulated-gate bipolar transistor (IGBT) with a small cell pitch below 2.5 ㎛. Presently, as a power device, the 1,200-V-class trench Si IGBT is used for automotives including electric vehicles, hybrid electric vehicles, and industrial motors. We obtained a breakdown voltage of 1,440 V, threshold of 6 V, and state voltage drop of 1.75 V. This device is superior to conventional IGBTs featuring a planar gate. To derive its electrical characteristics, we extracted design and process parameters. The cell pitch was 0.95 ㎛ and total wafer thickness was 140 ㎛ with a resistivity of 60 Ω·cm. We will apply these results to achieve fine-pitch gate power devices suitable for electrical automotive industries.
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