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Solid phase diffusion
WHERE t1.sid in(parameter_dbtbl_keyword '%Solid phase diffusion%') and t1.xml_status <> 99
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As-doped spin on-glass (1)
FinFET (1)
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Solid phase diffusion (1)
Ultra-shallow junction (1)
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2007 (1)
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Won Ju Cho (1)
Hong Bay Chung (1)
Hyun Mo Koo (1)
Sang Mo Koo (1)
Woo Hyun Lee (1)
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As-doped spin on-glass (1)
FinFET (1)
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Ultra-shallow junction (1)
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"Solid phase diffusion"
Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion
Won Ju Cho, Hyun Mo Koo, Woo Hyun Lee, Sang Mo Koo, Hong Bay Chung
J Electr Electron Mater
2007;20(5):394-398.
Published online May 1, 2007
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