Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
Synchronous
WHERE t1.sid in(parameter_dbtbl_keyword '%Synchronous%') and t1.xml_status <> 99
1
results for
"Synchronous"
Filter
Keywords
2D-correlation analysis (1)
BTMSM/O2 (1)
FTIR (1)
Low-k (1)
PECVD (1)
More +
Publication year
2008 (1)
Authors
Chang Su Hwang (1)
Jong Wook Kim (1)
Hong Bae Kim (1)
Keywords
2D-correlation analysis (1)
BTMSM/O2 (1)
FTIR (1)
Low-k (1)
PECVD (1)
SiOCH (1)
Synchronous (1)
Cancel
Close
authors
Chang Su Hwang (1)
Jong Wook Kim (1)
Hong Bae Kim (1)
Cancel
Close
Publication Year
2008 (1)
Cancel
Close
Funded articles
Cancel
Close
"Synchronous"
Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Korean Inst Electr Electron Mater Eng
2008;21(4):354-361.
Published online April 1, 2008
DOI:
https://doi.org/10.4313/JKEM.2008.21.4.354
PDF
Citations
Citations to this article as recorded by
Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film
Jong Wook Kim, Chang Su Hwang, Yong Heon Park, Hong Bae Kim
Journal of Korean Institute of Electrical and Electronic Materials Engineers.2009; 22(1): 47.
CrossRef
34
View
0
Download
1
Crossref
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
