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Structural and Electrical Properties of La0.7Sr0.3MnO3 Thin Films for Thermistor Applications
Jeong-Eun Lim, Byeong-Jun Park, Sam-Haeng Yi, Myung-gyu Lee, Joo-Seok Park, Byung-cheul Kim, Young-gon Kim, Sung-gap Lee
J Electr Electron Mater 2022;35(5):499-503.   Published online September 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.5.12
La0.7Sr0.3MnO3 precursor solution were prepared by a sol-gel method. La0.7Sr0.3MnO3 thin films were fabricated by a spin-coating method on a Pt/Ti/SiO2/Si substrate. Structural and electrical properties with the variation of sintering temperature were measured. All specimens exhibited a polycrystalline orthorhombic crystal structure, and the average thickness of the specimens coated 6 times decreased from about 427 nm to 383 nm as the sintering temperature increased from 740℃ to 830℃. Electrical resistance decreased as the sintering temperature increased. In the La0.7Sr0.3MnO3 thin films sintered at 830℃, electrical resistivity, TCR, B-value, and activation energy were 0.0374 mΩㆍcm, 0.316%/℃, 296 K and 0.023 eV, respectively.
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