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UV/O2
WHERE t1.sid in(parameter_dbtbl_keyword '%UV/O2%') and t1.xml_status <> 99
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"UV/O2"
Investigation of PEG (polyethyleneglycol) Removal Mechanism during UV/O2 Gas Phase Cleaning for Silicon Technology
J Electr Electron Mater
2006;19(11):985-993.
Published online November 1, 2006
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