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"Wafer pairs"

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"Wafer pairs"

Direct Bonding of Heterogeneous Insulator Silicon Pairs using Various Annealing Method
O Seong Song, Gi Yeong Lee
J Korean Inst Electr Electron Mater Eng 2003;16(10):859-864.   Published online October 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.10.859
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