Analysis of electron transport properties in SF6+He mixture gas used by MCS-BE

Sang Chul Ha; Heoi Young Yu; Sang Nam Kim; Byoung Doo Song; Seung Kwun Baek

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고전압 / MCS - BE 에 의한 SF6+He 혼합기체의 전자수송특성 해석

하상철, 유회영, 김상남, 송병두, 백승권

Analysis of electron transport properties in SF6+He mixture gas used by MCS-BE

Sang Chul Ha, Heoi Young Yu, Sang Nam Kim, Byoung Doo Song, Seung Kwun Baek

J Electr Electron Mater 2000;13(4):359-364.
Published online: April 1, 2000

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Analysis of electron transport properties in SF6+He mixture gas used by MCS-BE

J Electr Electron Mater. 2000;13(4):359-364. Published online April 1, 2000

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Analysis of electron transport properties in SF6+He mixture gas used by MCS-BE

J Electr Electron Mater. 2000;13(4):359-364. Published online April 1, 2000

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고전압 / MCS - BE 에 의한 SF6+He 혼합기체의 전자수송특성 해석

Analysis of electron transport properties in SF6+He mixture gas used by MCS-BE

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