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초전도 자성체 / Nd : YAG Laser 를 이용한 자성금속막의 패턴 식각에 있어서 에너지 흡수층이 미치는 영향

이주현, 송재성, 민복기, 서영준, 채상훈, 안승준

The Effect of Energy - absorbing layers on Micro - patterning of Magnetic Metal Films using Nd:YAG Laser

Ju Hyeon Lee, J . S . Song, B . K . Min, Young Joon Seo, Sang Hoon Chae, Seung Joon Ahn
J Electr Electron Mater 2000;13(6):538-544.
Published online: June 1, 2000
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The Effect of Energy - absorbing layers on Micro - patterning of Magnetic Metal Films using Nd:YAG Laser
J Electr Electron Mater. 2000;13(6):538-544.   Published online June 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Effect of Energy - absorbing layers on Micro - patterning of Magnetic Metal Films using Nd:YAG Laser
J Electr Electron Mater. 2000;13(6):538-544.   Published online June 1, 2000
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