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센서 기능성박막 / Ar/O2 에 따른 ZnO 박막의 C-축 배향성에 관한 연구

이동윤, 박용욱, 남산, 이전국, 김현재, 윤석진, 황금찬

A Study on C-axis Preferred Orientation of ZnO Thin Film at Ar/O2 gas ratios

Dong Yoon Lee, Yong Wook Park, San Nahm, Jeon Kook Lee, Hyun Jai Kim, Seok Jin Yoon, Keum Chan Whang
J Electr Electron Mater 2000;13(7):617-624.
Published online: July 1, 2000
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A Study on C-axis Preferred Orientation of ZnO Thin Film at Ar/O2 gas ratios
J Electr Electron Mater. 2000;13(7):617-624.   Published online July 1, 2000
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A Study on C-axis Preferred Orientation of ZnO Thin Film at Ar/O2 gas ratios
J Electr Electron Mater. 2000;13(7):617-624.   Published online July 1, 2000
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