Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

실리콘 카바이드 박막 제조를 위한 증착 반응연구

고준호, 우성일

A Study on Chemical Vapor Deposition Process for the Preparation of Thin Sic Films

Joon Ho Ko, Seong Ihl Woo
J Electr Electron Mater 1991;4(4):344-353.
  • 6 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev next

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

A Study on Chemical Vapor Deposition Process for the Preparation of Thin Sic Films
J Electr Electron Mater. 1991;4(4):344-353.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on Chemical Vapor Deposition Process for the Preparation of Thin Sic Films
J Electr Electron Mater. 1991;4(4):344-353.
Close