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기타 / 접속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝

이홍규, 이경철, 안민영, 이천

Laser - Induced Direct Copper Patterning Using Focused Ar+ Laser Beam

Hong Kyu Lee, Kyoung Cheol Lee, Min Young Ahn, Cheon Lee
J Electr Electron Mater 2000;13(11):969-975.
Published online: November 1, 2000
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Laser - Induced Direct Copper Patterning Using Focused Ar+ Laser Beam
J Electr Electron Mater. 2000;13(11):969-975.   Published online November 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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Laser - Induced Direct Copper Patterning Using Focused Ar+ Laser Beam
J Electr Electron Mater. 2000;13(11):969-975.   Published online November 1, 2000
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