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반도체 : 감광성 BCB 를 이용한 절연막층에서의 비아형성

주철원, 임성훈, 한병성

Via Formation in Dielectric Layers Made of Photosensitive BCB

Chul Won Ju, Sung Hun Lim, Byung Sung Han
J Electr Electron Mater 2001;14(5):351-355.
Published online: May 1, 2001
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Via Formation in Dielectric Layers Made of Photosensitive BCB
J Electr Electron Mater. 2001;14(5):351-355.   Published online May 1, 2001
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Via Formation in Dielectric Layers Made of Photosensitive BCB
J Electr Electron Mater. 2001;14(5):351-355.   Published online May 1, 2001
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