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센서 , 기능성 박막 고압용 크롬질화박막형 압력센서의 제작과 그 특성

정귀상, 최성규, 서정환, 류지구

Sensor , Thin Film The Fabrication of Chromium Nitride Thin - Film Type Pressure Sensors for High Pressure Application and Its Characteristics

Gwiy Sang Chung, Sung Kyu Choi, Jeong Hwan Seo, Gi Kyu Ryu
J Electr Electron Mater 2001;14(6):470-474.
Published online: June 1, 2001
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Sensor , Thin Film The Fabrication of Chromium Nitride Thin - Film Type Pressure Sensors for High Pressure Application and Its Characteristics
J Electr Electron Mater. 2001;14(6):470-474.   Published online June 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Include:
Sensor , Thin Film The Fabrication of Chromium Nitride Thin - Film Type Pressure Sensors for High Pressure Application and Its Characteristics
J Electr Electron Mater. 2001;14(6):470-474.   Published online June 1, 2001
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