Skip to main navigation Skip to main content
  • KIEEME

J Electr Electron Mater : Journal of Electrical and Electronic Materials

OPEN ACCESS
ABOUT
BROWSE ARTICLES
EDITORIAL POLICIES
FOR CONTRIBUTORS

Articles

1 , 2 차 모델링을 이용한 Ar RF 플라즈마의 응답 특성

박용섭, 정해덕

The Properties of Ar RF Plasma Using 1- and 2-dimensional Model

Yong Sup Park, Hae Duck Chung
J Electr Electron Mater 2001;14(8):622-628.
Published online: August 1, 2001
  • 4 Views
  • 0 Download
  • 0 Crossref
  • 0 Scopus
prev next

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

Include:

The Properties of Ar RF Plasma Using 1- and 2-dimensional Model
J Electr Electron Mater. 2001;14(8):622-628.   Published online August 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
The Properties of Ar RF Plasma Using 1- and 2-dimensional Model
J Electr Electron Mater. 2001;14(8):622-628.   Published online August 1, 2001
Close