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RF 마그네트론 스퍼터링법에 의한 SBT 박막의 강유전체 특성

조춘남, 김진사, 최운식, 박용필, 김충혁, 이준응

Ferroelectric Properties of SBT Thin Films Deposited by RF Magnetron Sputtering Method

Choon Nam Cho, Jin Sa Kim, Woon Shik Choi, Young Pil Park, Chung Hyeok Kim, Joon Ung Lee
J Electr Electron Mater 2001;14(9):731-735.
Published online: September 1, 2001
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Ferroelectric Properties of SBT Thin Films Deposited by RF Magnetron Sputtering Method
J Electr Electron Mater. 2001;14(9):731-735.   Published online September 1, 2001
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Ferroelectric Properties of SBT Thin Films Deposited by RF Magnetron Sputtering Method
J Electr Electron Mater. 2001;14(9):731-735.   Published online September 1, 2001
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