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센서 기능성박막 : 초음파 분무 열분해법으로 제조한 ZnO 막의 전기적 , 구조적 특성에 미치는 인듐 확산 효과

심대근, 배성찬, 마대영

Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis

Dae Keun Shin, Sung Chan Bae, Tae Young Ma
J Korean Inst Electr Electron Mater Eng 2001;14(10):828-834.
Published online: October 1, 2001
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Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis
J Korean Inst Electr Electron Mater Eng. 2001;14(10):828-834.   Published online October 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Indium Diffusion Effects on the Structural and Electrical Properties of ZnO Films Prepared by Ultrasonic Spray Pyrolysis
J Korean Inst Electr Electron Mater Eng. 2001;14(10):828-834.   Published online October 1, 2001
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