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CF4 / Ar 가스 플라즈마를 이용한 YMnO3 박막의 식각 반응연구

김동표, 김창일, 이철인

Etching Mechanism of YMnO3 Thin Films in High Density CF4 / Ar Plasma

Dong Pyo Kim, Chang Il Kim, Cheol In Lee
J Electr Electron Mater 2001;14(12):959-964.
Published online: December 1, 2001
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Etching Mechanism of YMnO3 Thin Films in High Density CF4 / Ar Plasma
J Electr Electron Mater. 2001;14(12):959-964.   Published online December 1, 2001
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Etching Mechanism of YMnO3 Thin Films in High Density CF4 / Ar Plasma
J Electr Electron Mater. 2001;14(12):959-964.   Published online December 1, 2001
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