A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

Eun Gu Lee; Dae Gyu Moon; Ho Young Jeong

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다결정 실리콘의 미세구조와 전기적 특성에 관한 연구

이은구, 문대규, 정호영

A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

Eun Gu Lee, Dae Gyu Moon, Ho Young Jeong

J Korean Inst Electr Electron Mater Eng 1992;5(3):310-318.

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A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

J Korean Inst Electr Electron Mater Eng. 1992;5(3):310-318.

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A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

J Korean Inst Electr Electron Mater Eng. 1992;5(3):310-318.

Articles

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다결정 실리콘의 미세구조와 전기적 특성에 관한 연구

A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

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