The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

Dong Pyo Kim; Chang Il Kim; Tae Hyung Kim; Won Jae Lee; Byung Gon Yu; Cheol In Lee

Articles

Page Path

CI2 / CF4 / Ar 유도결합 플라즈마에 의해 식각된 SBT 박막의 표면 손상

김동표, 김창일, 김태형, 이원재, 유병곤, 이철인

The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

Dong Pyo Kim, Chang Il Kim, Tae Hyung Kim, Won Jae Lee, Byung Gon Yu, Cheol In Lee

J Electr Electron Mater 2002;15(7):570-575.
Published online: July 1, 2002

7 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

J Electr Electron Mater. 2002;15(7):570-575. Published online July 1, 2002

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

J Electr Electron Mater. 2002;15(7):570-575. Published online July 1, 2002

Articles

Page Path

CI2 / CF4 / Ar 유도결합 플라즈마에 의해 식각된 SBT 박막의 표면 손상

The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

Full Article

CITE

Download Citation

Format:

Include:

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS