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CI2 / CF4 / Ar 유도결합 플라즈마에 의해 식각된 SBT 박막의 표면 손상

김동표, 김창일, 김태형, 이원재, 유병곤, 이철인

The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma

Dong Pyo Kim, Chang Il Kim, Tae Hyung Kim, Won Jae Lee, Byung Gon Yu, Cheol In Lee
J Korean Inst Electr Electron Mater Eng 2002;15(7):570-575.
Published online: July 1, 2002
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The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma
J Korean Inst Electr Electron Mater Eng. 2002;15(7):570-575.   Published online July 1, 2002
DOI: https://doi.org/10.4313/JKEM.2002.15.7.570
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Surface Damage of SBT Thin Film Etched in CI2 / CF4 / Ar Plasma
J Korean Inst Electr Electron Mater Eng. 2002;15(7):570-575.   Published online July 1, 2002
DOI: https://doi.org/10.4313/JKEM.2002.15.7.570
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