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반경험적인 실험설계 기법을 이용한 CMP 공정 변수의 최적화

이경진, 김상용, 서용진

Optimization of CMP Process Parameter using Semi-empirical DOE (Design of Experiment) Technique

Kyoung Jin Lee, Sang Yong Kim, Yong Jin Seo
J Electr Electron Mater 2002;15(11):939-945.
Published online: November 1, 2002
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Optimization of CMP Process Parameter using Semi-empirical DOE (Design of Experiment) Technique
J Electr Electron Mater. 2002;15(11):939-945.   Published online November 1, 2002
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Optimization of CMP Process Parameter using Semi-empirical DOE (Design of Experiment) Technique
J Electr Electron Mater. 2002;15(11):939-945.   Published online November 1, 2002
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