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SOI 웨이퍼를 이용한 압전박막공진기 제작

김인태, 박윤권, 이시형, 이윤희, 이전국, 김남수, 주병권

Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

In Tae Kim, Yun Kwon Park, Si Hyung Lee, Yun Hi Lee, Jeon Kook Lee, Nam Soo Kim, Byeong Kwon Ju
J Electr Electron Mater 2002;15(12):1039-1044.
Published online: December 1, 2002
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Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer
J Electr Electron Mater. 2002;15(12):1039-1044.   Published online December 1, 2002
Download Citation

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Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer
J Electr Electron Mater. 2002;15(12):1039-1044.   Published online December 1, 2002
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