Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

In Tae Kim; Yun Kwon Park; Si Hyung Lee; Yun Hi Lee; Jeon Kook Lee; Nam Soo Kim; Byeong Kwon Ju

doi:10.4313/JKEM.2002.15.12.1039

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SOI 웨이퍼를 이용한 압전박막공진기 제작

김인태, 박윤권, 이시형, 이윤희, 이전국, 김남수, 주병권

Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

In Tae Kim, Yun Kwon Park, Si Hyung Lee, Yun Hi Lee, Jeon Kook Lee, Nam Soo Kim, Byeong Kwon Ju

J Korean Inst Electr Electron Mater Eng 2002;15(12):1039-1044.
Published online: December 1, 2002

DOI: https://doi.org/10.4313/JKEM.2002.15.12.1039

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Keywords: FBAR, Piezoelectric, SOI, MMIC, Membrane

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Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

J Korean Inst Electr Electron Mater Eng. 2002;15(12):1039-1044. Published online December 1, 2002

DOI: https://doi.org/10.4313/JKEM.2002.15.12.1039

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

J Korean Inst Electr Electron Mater Eng. 2002;15(12):1039-1044. Published online December 1, 2002

DOI: https://doi.org/10.4313/JKEM.2002.15.12.1039

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SOI 웨이퍼를 이용한 압전박막공진기 제작

Monolithic Film Bulk Acoustic Wave Resonator using SOI Wafer

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