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초전도 박막 제작을 위한 산호 시스템 구축 및 평가

임종관, 박용필, 송경용

Construction and Evaluation of Oxidation System for Superconductor Thin Film

Jung Kwan Lim, Yong Pil Park, Gyung Yong Song
J Electr Electron Mater 2003;16(2):163-167.
Published online: February 1, 2003
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Construction and Evaluation of Oxidation System for Superconductor Thin Film
J Electr Electron Mater. 2003;16(2):163-167.   Published online February 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
Construction and Evaluation of Oxidation System for Superconductor Thin Film
J Electr Electron Mater. 2003;16(2):163-167.   Published online February 1, 2003
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