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저 에너지 이온 주입의 개선을 위한 변형된 감속모드 이온 주입의 안정화 특성

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Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

Yong Jin Seo, Chang Jun Park, Sang Yong Kim
J Electr Electron Mater 2003;16(3):175-180.
Published online: March 1, 2003
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Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process
J Electr Electron Mater. 2003;16(3):175-180.   Published online March 1, 2003
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process
J Electr Electron Mater. 2003;16(3):175-180.   Published online March 1, 2003
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