Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

Yong Jin Seo; Chang Jun Park; Sang Yong Kim

doi:10.4313/JKEM.2003.16.3.175

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저 에너지 이온 주입의 개선을 위한 변형된 감속모드 이온 주입의 안정화 특성

서용진, 박창준, 김상용

Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

Yong Jin Seo, Chang Jun Park, Sang Yong Kim

J Korean Inst Electr Electron Mater Eng 2003;16(3):175-180.
Published online: March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.175

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Keywords: Ion implantation, Deceleration mode, Drift mode, High dose, Low energy

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Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

J Korean Inst Electr Electron Mater Eng. 2003;16(3):175-180. Published online March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.175

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Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

J Korean Inst Electr Electron Mater Eng. 2003;16(3):175-180. Published online March 1, 2003

DOI: https://doi.org/10.4313/JKEM.2003.16.3.175

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저 에너지 이온 주입의 개선을 위한 변형된 감속모드 이온 주입의 안정화 특성

Stabilization of Modified Deceleration Mode for Improvement of Low-energy Ion implantation Process

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