Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma

Jae Hwa Park; Kyoung Tae Kim; Dong Pyo Kim; Chang Il Kim; Eui Goo Chang

Articles

Page Path

Cl-based 플라즈마에 의한 YMnO3 박막의 식각 damage에 관한 연구

박재화, 김경태, 김동표, 김창일, 장의구

Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma

Jae Hwa Park, Kyoung Tae Kim, Dong Pyo Kim, Chang Il Kim, Eui Goo Chang

J Electr Electron Mater 2003;16(6):449-453.
Published online: June 1, 2003

6 Views
0 Download
0 Crossref
0 Scopus

Full Article

Download PDF

Keywords: Ferroelectric, YMnO3, ICP, Damage, Etching

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma

J Electr Electron Mater. 2003;16(6):449-453. Published online June 1, 2003

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma

J Electr Electron Mater. 2003;16(6):449-453. Published online June 1, 2003

Articles

Page Path

Cl-based 플라즈마에 의한 YMnO3 박막의 식각 damage에 관한 연구

Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS