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레이저 활성화에 의한 p형 SiC와 비합금 Mo 오믹 접합

이창영, 송지헌, 최재승, 이재봉, 김기호, 김영석, 박근형, 이형규

Characteristics of Non-alloyed Mo Ohmic Contacts to Laser Activated p-type SiC

C. Y. Lee, J. H. Song, J. S. Choi, J. B. Lee, K. H. Kim, Y. S. Kim, K. H. Park, H. G. Lee
J Electr Electron Mater 2003;16(7):557-563.
Published online: July 1, 2003
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Characteristics of Non-alloyed Mo Ohmic Contacts to Laser Activated p-type SiC
J Electr Electron Mater. 2003;16(7):557-563.   Published online July 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Characteristics of Non-alloyed Mo Ohmic Contacts to Laser Activated p-type SiC
J Electr Electron Mater. 2003;16(7):557-563.   Published online July 1, 2003
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