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FBAR용 ZnO/SiO2/Si 박막의 결정학적 특성에 관한 연구

금민종, 손인환, 최명규, 추순남, 최형욱, 신영화, 김경환

A Study of the Crystallographic Properties of ZnO/SiO2/Si Thin Film for FBAR

Min Jong Geum, In Hwan Son, Myeong Gyu Choe, Sun Nam Chu, Hyeong Ug Choe, Yeong Hwa Sin, Gyeong Hwan Kim
J Electr Electron Mater 2003;16(8):711-715.
Published online: August 1, 2003
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A Study of the Crystallographic Properties of ZnO/SiO2/Si Thin Film for FBAR
J Electr Electron Mater. 2003;16(8):711-715.   Published online August 1, 2003
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A Study of the Crystallographic Properties of ZnO/SiO2/Si Thin Film for FBAR
J Electr Electron Mater. 2003;16(8):711-715.   Published online August 1, 2003
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